Technology Group 1 (Lithography、Etching)
Title Name Telephone / Fax Responsibility Job Deputy
Technology group 1
Leader
Mr. Hu, Jack 
Office:03-5712121 ext.55607
Laboratory:03-5712121 ext.55689
Fax:03-5724241
Coordination within the group 1 of related matters.
Responsible for the following instruments: Poly-Si RIE / 
RIE 200L/ HDP-RIE / P5000E / Si Deep-RIE
Mr. Lee, James  (First Deputy)
Miss Fan, Hsiu-Lan  (Second Deputy)
Technology group 1
Member
Office:03-5712121 ext.55660
Laboratory:03-5712121 ext.55666
Fax:03-5724241
Responsible for the following instruments: Poly-Si RIE / RIE 200L / HDP-RIE / P5000E / Si Deep-RIE
Mr. Hu, Jack  (First Deputy)
Mr. Huang, Guo-Hua  (Second Deputy)
Technology group 1
Member
Office:03-5712121 ext.55672
Laboratory:03-5712121 ext.55337/55676
Fax:03-5724241
Responsible for the following instruments: SEM S-4700I / SEM SU-8010
Mr. Chao , Jerry (First Deputy)
Mr. Hu, Jack (Second Deputy)
Technology group 1
member
Office:03-5712121 ext.55659
Laboratory:03-5712121 ext.55667
Fax:03-5724241
Responsible for the following instruments: Laser Pattern Generator, DWL-200
Mr. Tsai, Ching-Hsiang (First Deputy)
Mr. Lee, James (Second Deputy)
Technology group 1
Member
Office:03-5712121 ext.55605
Laboratory:03-5712121 ext.55616
Fax:03-5724241
Responsible for the following instruments: Laser Pattern Generator, DWL-200 / Pattern Generator
Mr. Huang, Guo-Hua (First Deputy)
Mr. Chao , Jerry (Second Deputy)
Technology group 1
Member
Office:03-5712121 ext.55670
Laboratory:03-5712121 ext.55667
Fax:03-5724241
Responsible for the following instruments: Double Side Mask Aligner / Photo Resist Spinner / Vacuum Oven / Optical Microscope / Dektak XT
Miss Fan, Hsiu-Lan (First Deputy)
Mr. Tsai, Ching-Hsiang (Second Deputy)

Technology Group 2 (High Temperature、Film)

Title Name Telephone / Fax Responsibility Job Deputy
Technology group 2
Leader
Office:03-5712121 ext.55668
Laboratory:03-5712121 ext.55610
Fax:03-5724241
Coordination within the group 2 of related matters.
Responsible for the following instruments: Oxidation & Diffusion Furnances / Dual E-Gun Evaporation System A
Mr. Lai, White (First Deputy)
Miss Ni, Yuech Chen (Second Deputy)
Technology group 2
Member
(Deputy)Mr. Chang, Chen-Hsien 
Office:03-5712121 ext.55608
Laboratory:03-5712121 ext.55368
Fax:03-5724241
Responsible for the following instruments: Dual beam [focused ion beam & electron beam] System (FIB)
Mr. Lin, Sheng Chin (First Deputy)
Mr. Lai, White (Second Deputy)
Technology group 2
Member
Office:03-5712121 ext.55669
Laboratory:03-5712121 ext.55608
Fax:03-5724241
Responsible for the following instruments: Dual E-Gun Evaporation System B / Thermal Evaporation Coater / High Vacuum Deposition System
Mr. Chan, Chia-Chi (First Deputy)
Mr. Fan, Yang-Chen (Second Deputy)
Technology group 2
Member
Office:03-5712121 ext.55622
Laboratory:03-5712121 ext.55616/55666
Fax:03-5724241
Responsible for the following instruments: ALD / LPCVD / Ellipsometer
Miss Ni, Yuech Chen (First Deputy)
Technology group 2
Member
Office:03-5712121 ext.55606
Laboratory:03-5712121 ext.55616
Fax:03-5724241
Responsible for the following instruments: Wet Bench / LPCVD / PECVD / Reflectometer
Mr. Fan, Yang-Chen (First Deputy)
Mr. Lin, Sheng Chin (Second Deputy)
Technology group 2
Member
Mr. Chang, Chen-Hsien 
Office:03-5712121 ext.55657
Laboratory:03-5712121 ext.55608
Fax:03-5724241
Responsible for the following instruments: Sputtering System A / Sputtering System B / 4-point Probe
Miss Ni, Yuech Chen (First Deputy)
Mr. Lai, White (Second Deputy)
Technology group 2
Member
Office:03-5712121 ext.5561
Laboratory:03-5712121 ext.55616
Fax:03-5724241
Procurement of chemicals and developer
Clean room masks, gloves procurement management, on-site supply, inspection and inventory, etc.
Waste liquid statistics, recycling and other operations
Inspection meter reading and status report of factory gas equipment.
Official document, letter transmission and delivery
Clean clothes organized and sent to be washed.
Mr. Lai, White (First Deputy)
(Visited 30 times, 1 visits today)